Plasmochemical deposition of amorphous hydrogenated silicon films

Bosyakov, M. N. / Grunskii, D. I. / Dostanko, A. P. | British Library Online Contents | 1999

Crystallization kinetics of hydrogenated amorphous silicon thick films grown by plasma-enhanced chemical vapour deposition

Farjas, J. / Rath, C. / Roura, P. et al. | British Library Online Contents | 2004

Deposition of hydrogenated amorphous silicon-carbon films by vacuum ultraviolet photo-CVD

Fujii, T. / Yoshimoto, M. / Fuyuki, T. et al. | British Library Online Contents | 1994

Tin induced crystallisation of hydrogenated amorphous silicon thin films

Jeon, M. / Jeong, C. / Kamisako, K. | British Library Online Contents | 2010

Multiphase structure of hydrogenated amorphous silicon carbide thin films

Wang, Y. H. / Lin, J. / Huan, C. H. | British Library Online Contents | 2002