Deposition of hydrogenated amorphous silicon-carbon films by vacuum ultraviolet photo-CVD

Fujii, T. / Yoshimoto, M. / Fuyuki, T. et al. | British Library Online Contents | 1994

In-situ investigations of radical kinetics in the deposition of hydrogenated amorphous silicon films

Tachibana, K. | British Library Online Contents | 1993

Multiphase structure of hydrogenated amorphous silicon carbide thin films

Wang, Y. H. / Lin, J. / Huan, C. H. | British Library Online Contents | 2002

Tin induced crystallisation of hydrogenated amorphous silicon thin films

Jeon, M. / Jeong, C. / Kamisako, K. | British Library Online Contents | 2010

Crystallization kinetics of hydrogenated amorphous silicon thick films grown by plasma-enhanced chemical vapour deposition

Farjas, J. / Rath, C. / Roura, P. et al. | British Library Online Contents | 2004