Plasmochemical deposition of amorphous hydrogenated silicon films

Bosyakov, M. N. / Grunskii, D. I. / Dostanko, A. P. | British Library Online Contents | 1999

Vacuum ultraviolet, ultraviolet and visible absorption spectra study of hydrogenated amorphous carbon films prepared by RF plasma chemical vapour deposition

Nakayama, M. / Shibahara, M. / Maruama, K. et al. | British Library Online Contents | 1993

Photo-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbon using an internal discharge lamp

Miyajima, S. / Milne, W. I. / Yoon, S. F. et al. | British Library Online Contents | 1995

Some peculiarities in ultraviolet absorption spectra for hydrogenated amorphous carbon thin films

Lazar, G. | British Library Online Contents | 2002

Deposition of hydrogenated amorphous carbon nitride films by dielectric barrier discharge plasmas

Niu, J. / Zhang, L. / Zhang, Z. et al. | British Library Online Contents | 2010