Aluminium Nitride Coatings Preparation using a Chemical Vapour Deposition Process

Armas, B. / Combescure, C. / De Icaza Herrera, M. et al. | British Library Online Contents | 2000

Growth of oriented aluminium nitride films on silicon by chemical vapour deposition

Khan, A. H. / Odeh, M. F. / Meese, J. M. et al. | British Library Online Contents | 1994

Silica coating of aluminium nitride particles by radio-frequency plasma chemical vapour deposition

Tsugeki, K. / Yan, S. / Maeda, H. et al. | British Library Online Contents | 1994

Growth of aluminium nitride on porous silica by atomic layer chemical vapour deposition

Puurunen, R. L. / Root, A. / Sarv, P. et al. | British Library Online Contents | 2000

Hybrid plasma chemical vapour deposition of aluminium nitride from Al and NH~3/N~2 mixtures

Ahmed, W. / Tither, D. | British Library Online Contents | 1997