Growth of aluminium nitride on porous silica by atomic layer chemical vapour deposition

Puurunen, R. L. / Root, A. / Sarv, P. et al. | British Library Online Contents | 2000

Aluminium Nitride Coatings Preparation using a Chemical Vapour Deposition Process

Armas, B. / Combescure, C. / De Icaza Herrera, M. et al. | British Library Online Contents | 2000

Growth of oriented aluminium nitride films on silicon by chemical vapour deposition

Khan, A. H. / Odeh, M. F. / Meese, J. M. et al. | British Library Online Contents | 1994

Hybrid plasma chemical vapour deposition of aluminium nitride from Al and NH~3/N~2 mixtures

Ahmed, W. / Tither, D. | British Library Online Contents | 1997

Some properties of aluminium nitride powder synthesized by low-pressure chemical vapour deposition

Itatani, K. / Sano, K. / Howell, F. S. et al. | British Library Online Contents | 1993