Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

Chandra, S. V. / Uthanna, S. / Rao, G. M. | British Library Online Contents | 2008

Substrate-temperature dependent structure and composition variations in RF magnetron sputtered titanium nitride thin films

Vasu, K. / Krishna, M. G. / Padmanabhan, K. A. | British Library Online Contents | 2011

Effect of substrate bias and temperature on magnetron sputtered CrSiN films

Tan, S. / Zhang, X. / Wu, X. et al. | British Library Online Contents | 2011

Effect of substrate temperature on the structural properties of magnetron sputtered titanium nitride thin films with brush plated nickel interlayer on mild steel

Subramanian, B. / Ashok, K. / Jayachandran, M. | British Library Online Contents | 2008

Effects of Substrate Temperature and Oxygen Pressure on Crystallographic Orientations of Sputtered Nickel Oxide Films

Chen, H.-L. / Lu, Y.-M. / Wu, J.-Y. et al. | British Library Online Contents | 2005