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    The effect of substrate temperature on the properties of sputtered titanium oxide films

    New search for: Meng, L.
    New search for: Andritschky, M.
    New search for: Dos Santos, M. P.

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    The effect of substrate temperature on the properties of sputtered titanium oxide films

    New search for: Meng, L.
    New search for: Andritschky, M.
    New search for: Dos Santos, M. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The effect of substrate temperature on the properties of sputtered titanium oxide films

    New search for: Meng, L.
    New search for: Andritschky, M.
    New search for: Dos Santos, M. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    The effect of substrate temperature on the properties of sputtered titanium oxide films

    Contributors:

    Meng, L. (author) / Andritschky, M. (author) / Dos Santos, M. P. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 65//66 ; 235

    Publication date:

    1993-01-01

    Size:

    235 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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