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Photon- and catalysis-assisted silicon oxynitridation at room temperature: a comparative study
Photon- and catalysis-assisted silicon oxynitridation at room temperature: a comparative study
Photon- and catalysis-assisted silicon oxynitridation at room temperature: a comparative study
Glachant, A. (Autor:in) / Soukiassian, P. (Autor:in)
APPLIED SURFACE SCIENCE ; 65//66 ; 654
01.01.1993
654 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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