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    Photon- and catalysis-assisted silicon oxynitridation at room temperature: a comparative study

    New search for: Glachant, A.
    New search for: Soukiassian, P.

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    Photon- and catalysis-assisted silicon oxynitridation at room temperature: a comparative study

    New search for: Glachant, A.
    New search for: Soukiassian, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Photon- and catalysis-assisted silicon oxynitridation at room temperature: a comparative study

    New search for: Glachant, A.
    New search for: Soukiassian, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Photon- and catalysis-assisted silicon oxynitridation at room temperature: a comparative study

    Contributors:

    Glachant, A. (author) / Soukiassian, P. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 65//66 ; 654

    Publication date:

    1993-01-01

    Size:

    654 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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