Initial oxynitridation of a Si(1 0 0) 2 x 1 surface by the annealing and low energy nitrogen ion exposure

Kim, K. J. / Ihm, K. / Jeon, C. et al. | British Library Online Contents | 2003

Photon- and catalysis-assisted silicon oxynitridation at room temperature: a comparative study

Glachant, A. / Soukiassian, P. | British Library Online Contents | 1993

Conditions for Gaseous Nitridation and Oxynitridation of Crystalline Silicon Powders

Ming, L. / Yin, C.-q. / Wei, X.-q. et al. | British Library Online Contents | 2010

Ultrathin oxynitridation process through ion implantation in a poly Si1-xGex gate MOS capacitor

Jacob, A. P. / Myrberg, T. / Friesel, M. et al. | British Library Online Contents | 2003

High-resolution photoemission electron spectroscopy study on the oxynitridation of 6H-SiC(0001)-3x3R30degree surface

Labis, J. / Oh, J. / Namatame, H. et al. | British Library Online Contents | 2004