Post-deposition annealing of RF-sputtered zinc-oxide films

Bekman, H. H. P. T. / Benoist, K. W. / Joppe, J. L. | British Library Online Contents | 1993

Structural and electrical properties of radio frequency magnetron sputtered tantalum oxide films: Influence of post-deposition annealing

Chandra, S. V. J. / Choi, C.-J. / Uthanna, S. et al. | British Library Online Contents | 2010

Impact of post-deposition annealing on surface, bulk and interface properties of RF sputtered AlN films

Kar, J.P. / Mukherjee, S. / Bose, G. et al. | British Library Online Contents | 2009

Properties of Reactive Magnetron Sputtered ITO Films without in-situ Substrate Heating and Post-deposition Annealing

Chen, M. / Bai, X. / Gong, J. et al. | British Library Online Contents | 2000

Effect of post-deposition annealing on phase formation and properties of RF magnetron sputtered PLZT thin films

Singh, R. / Goel, T. C. / Chandra, S. | British Library Online Contents | 2008