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Microstructure of SiC thin films produced on graphite by excimer-laser chemical vapour deposition
Microstructure of SiC thin films produced on graphite by excimer-laser chemical vapour deposition
Microstructure of SiC thin films produced on graphite by excimer-laser chemical vapour deposition
Suzuki, H. (Autor:in) / Araki, H. (Autor:in) / Noda, T. (Autor:in)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 13 ; 49
01.01.1994
49 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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