Photochemical vapour deposition of hydrogenated amorphous silicon-carbon thin films by using a Xe^*~2 excimer lamp

Redondas, X. / Gonzalez, P. / Chiussi, S. et al. | British Library Online Contents | 1996

Crystallization kinetics of hydrogenated amorphous silicon thick films grown by plasma-enhanced chemical vapour deposition

Farjas, J. / Rath, C. / Roura, P. et al. | British Library Online Contents | 2004

Microstructure of SiC thin films produced on graphite by excimer-laser chemical vapour deposition

Suzuki, H. / Araki, H. / Noda, T. | British Library Online Contents | 1994

Photo-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbon using an internal discharge lamp

Miyajima, S. / Milne, W. I. / Yoon, S. F. et al. | British Library Online Contents | 1995

Plasmochemical deposition of amorphous hydrogenated silicon films

Bosyakov, M. N. / Grunskii, D. I. / Dostanko, A. P. | British Library Online Contents | 1999