High-rate electron cyclotron resonance etching of GaAs via holes

Chen, Y. W. / Ooi, B. S. / Ng, G. I. et al. | British Library Online Contents | 2000

Electron Energy-Loss Spectroscopy of Carbon Films Prepared by Electron-Cyclotron-Resonance Plasma Sputtering

Murooka, Y. / Tanaka, N. / Hirono, S. et al. | British Library Online Contents | 2002

Preparation and characterization of TiN films by electron cyclotron resonance (ECR) sputtering for diffusion barrier applications

Deenamma Vargheese, K. / Mohan Rao, G. / Balasubramanian, T. V. et al. | British Library Online Contents | 2001

Growth of preferentially c-axis oriented hydroxyapatite thin films on Si(100) substrate by electron-cyclotron-resonance plasma sputtering

Akazawa, H. / Ueno, Y. | British Library Online Contents | 2013

Heteroepitaxy of 3C-SiC by electron cyclotron resonance-CVD technique

Mandracci, P. / Chiodoni, A. / Cicero, G. et al. | British Library Online Contents | 2001