Light element distribution in ZnO thin film deposited by electron cyclotron resonance assisted chemical vapor deposition

Sakaguchi, I. | British Library Online Contents | 2003

Physical properties of a-C:H films prepared by electron cyclotron resonance microwave plasma chemical vapor deposition

Zhou, X. T. / Lee, S. T. / Bello, I. et al. | British Library Online Contents | 2000

Studies on low temperature silicon grain growth on SiO~2 by electron cyclotron resonance chemical vapor deposition

Wang, K. C. / Hwang, H. L. / Loferski, J. J. et al. | British Library Online Contents | 1996

Study on the electron cyclotron resonance plasma chemical vapor deposition of carbon nanotubes

Wang, Z. / Ba, D. / Cao, P. et al. | British Library Online Contents | 2007

Effect of hydrogen content on the ZnO thin films on the surface of polyethylene terephthalate substrate through electron cyclotron resonance-metal organic chemical vapor deposition

Park, J. H. / Byun, D. / Jeon, B. J. et al. | British Library Online Contents | 2008