Biased Electron Cyclotron Resonance Chemical-Vapor Deposition of Silicon Dioxide Inter-Metal Dielectric Thin Films

Shufflebotham, P. / Weise, M. / Pirkle, D. et al. | British Library Online Contents | 1993

Light element distribution in ZnO thin film deposited by electron cyclotron resonance assisted chemical vapor deposition

Sakaguchi, I. | British Library Online Contents | 2003

Physical properties of a-C:H films prepared by electron cyclotron resonance microwave plasma chemical vapor deposition

Zhou, X. T. / Lee, S. T. / Bello, I. et al. | British Library Online Contents | 2000

Study on the electron cyclotron resonance plasma chemical vapor deposition of carbon nanotubes

Wang, Z. / Ba, D. / Cao, P. et al. | British Library Online Contents | 2007

Effect of deposition pressure on bonding nature in hydrogenated amorphous carbon films processed by electron cyclotron resonance plasma enhanced chemical vapor deposition

Ryu, H.J. / Kim, S.H. / Hong, S.H. | British Library Online Contents | 2000