Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Si-rich surface layer of photochemically deposited silicon nitride
Si-rich surface layer of photochemically deposited silicon nitride
Si-rich surface layer of photochemically deposited silicon nitride
Wadayama, T. (Autor:in) / Shibata, H. (Autor:in) / Kobayashi, T. (Autor:in) / Hatta, A. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 29 ; 1041
01.01.1994
1041 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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