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Si-rich surface layer of photochemically deposited silicon nitride
Si-rich surface layer of photochemically deposited silicon nitride
Si-rich surface layer of photochemically deposited silicon nitride
Wadayama, T. (author) / Shibata, H. (author) / Kobayashi, T. (author) / Hatta, A. (author)
JOURNAL OF MATERIALS SCIENCE ; 29 ; 1041
1994-01-01
1041 pages
Article (Journal)
Unknown
DDC:
620.11
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