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Si-rich surface layer of photochemically deposited silicon nitride

Wadayama, T. / Shibata, H. / Kobayashi, T. / Hatta, A.

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Si-rich surface layer of photochemically deposited silicon nitride

Wadayama, T. / Shibata, H. / Kobayashi, T. / Hatta, A.

Si-rich surface layer of photochemically deposited silicon nitride

Wadayama, T. / Shibata, H. / Kobayashi, T. / Hatta, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Si-rich surface layer of photochemically deposited silicon nitride

Contributors:

Wadayama, T. (author) / Shibata, H. (author) / Kobayashi, T. (author) / Hatta, A. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 29 ; 1041

Publication date:

1994-01-01

Size:

1041 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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