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Reduction of carbon impurity in GaAs by photo-irradiation in atomic layer epitaxy
Reduction of carbon impurity in GaAs by photo-irradiation in atomic layer epitaxy
Reduction of carbon impurity in GaAs by photo-irradiation in atomic layer epitaxy
Iwai, S. (Autor:in) / Meguro, T. (Autor:in) / Isshiki, H. (Autor:in) / Sugano, T. (Autor:in)
APPLIED SURFACE SCIENCE ; 79/80 ; 232
01.01.1994
232 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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