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Barriers Against Copper Diffusion into Silicon and Drift Though Silicon Dioxide
Barriers Against Copper Diffusion into Silicon and Drift Though Silicon Dioxide
Barriers Against Copper Diffusion into Silicon and Drift Though Silicon Dioxide
Wang, S.-Q. (Autor:in)
MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 19 ; 30
01.01.1994
30 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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