Residual Stress in Thin Films of RF-Sputtered Aluminum by X-Ray Multiaxial Stress Measurement

Ejiri, S. / Lin, Z. / Sasaki, T. et al. | British Library Online Contents | 1997

Shear strength measurements of hafnium diboride thin solid films

Lee, J. / Polychronopoulou, K. / Cloud, A. N. et al. | British Library Online Contents | 2014

Nanoscratch and nanofriction behavior of hafnium diboride thin films

Chatterjee, A. / Kumar, N. / Abelson, J. R. et al. | British Library Online Contents | 2008

Residual Stress of Aluminum Thin Films Sputtered on Silicon Wafers Measured by X-Ray Diffraction

Tanaka, K. / Ishihara, K. / Akiniwa, Y. | British Library Online Contents | 1997

Atomic layer deposition of hafnium and zirconium silicate thin films

Vainonen-Ahlgren, E. / Tois, E. / Ahlgren, T. et al. | British Library Online Contents | 2003