X-Ray Measurement of Residual Stress Distribution in Sputtered Cu Thin Films

Akiniwa, Y. / Sakaue, T. | British Library Online Contents | 2012

Residual Stress of Aluminum Thin Films Sputtered on Silicon Wafers Measured by X-Ray Diffraction

Tanaka, K. / Ishihara, K. / Akiniwa, Y. | British Library Online Contents | 1997

Residual Stress Measurement in Sputtered Copper Thin Films by Synchrotron Radiation and Ordinary X-Rays

Hataya, M. / Hanabusa, T. / Kusaka, K. et al. | British Library Online Contents | 2005

Residual Stress in Thin Films of Aluminum/Hafnium

Rant, S. J. / Goldsmith, C. C. / Noyan, I. C. | British Library Online Contents | 1994

Obtaining multiaxial residual stress distributions from limited measurements

Smith, D. J. / Farrahi, G. H. / Zhu, W. X. et al. | British Library Online Contents | 2001