Hafnium silicon oxide films prepared by atomic layer deposition

Kukli, K. / Ritala, M. / Leskela, M. et al. | British Library Online Contents | 2004

Deposition of Thin Films of Zirconium and Hafnium Boride by Plasma Enhanced Chemical Vapor Deposition

Reich, S. / Suhr, H. / Hanko, K. et al. | British Library Online Contents | 1992

Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures

Aarik, J. / Aidla, A. / Mandar, H. et al. | British Library Online Contents | 2001

Perovskite Thin Films via Atomic Layer Deposition

Sutherland, B. R. / Hoogland, S. / Adachi, M. M. et al. | British Library Online Contents | 2015

Atomic layer deposition of PbZrO3 thin films

Harjuoja, J. / Vayrynen, S. / Putkonen, M. et al. | British Library Online Contents | 2007