Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Oxidation of TiN thin films in an ion-beam-assisted deposition process
Oxidation of TiN thin films in an ion-beam-assisted deposition process
Oxidation of TiN thin films in an ion-beam-assisted deposition process
Kubota, H. (Autor:in) / Nagata, M. (Autor:in) / Miyagawa, R. (Autor:in) / Nicolet, M. A. (Autor:in)
APPLIED SURFACE SCIENCE ; 82/83 ; 565
01.01.1994
565 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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