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Low grain size TiN thin films obtained by low energy ion beam assisted deposition
Low grain size TiN thin films obtained by low energy ion beam assisted deposition
Low grain size TiN thin films obtained by low energy ion beam assisted deposition
Lopez, J. M. (Autor:in) / Gordillo-Vazquez, F. J. (Autor:in) / Bohme, O. (Autor:in) / Albella, J. M. (Autor:in)
APPLIED SURFACE SCIENCE ; 173 ; 290-295
01.01.2001
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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