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Surface kinetics and morphology of ArF laser-assisted etching of (113)A GaAs in a Cl~2 environment
Surface kinetics and morphology of ArF laser-assisted etching of (113)A GaAs in a Cl~2 environment
Surface kinetics and morphology of ArF laser-assisted etching of (113)A GaAs in a Cl~2 environment
Tejedor, P. (Autor:in) / Dominguez, P. S. (Autor:in)
APPLIED SURFACE SCIENCE ; 89 ; 271
01.01.1995
271 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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