Surface kinetics and morphology of ArF laser-assisted etching of (113)A GaAs in a Cl~2 environment: Fid-Bau Portal

Surface kinetics and morphology of ArF laser-assisted etching of (113)A GaAs in a Cl~2 environment

Tejedor, P. / Dominguez, P. S.

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Surface kinetics and morphology of ArF laser-assisted etching of (113)A GaAs in a Cl~2 environment

Tejedor, P. / Dominguez, P. S.

Surface kinetics and morphology of ArF laser-assisted etching of (113)A GaAs in a Cl~2 environment

Tejedor, P. / Dominguez, P. S.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Surface kinetics and morphology of ArF laser-assisted etching of (113)A GaAs in a Cl~2 environment

Contributors:

Tejedor, P. (author) / Dominguez, P. S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 89 ; 271

Publication date:

1995-01-01

Size:

271 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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