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Annealing effects in undoped and phosphorus doped low temperature oxide layers
Annealing effects in undoped and phosphorus doped low temperature oxide layers
Annealing effects in undoped and phosphorus doped low temperature oxide layers
Samitier, J. (Autor:in) / Moreno, J. A. (Autor:in) / Garrido, B. (Autor:in) / Marco, S. (Autor:in) / Ruiz, O. (Autor:in) / Morante, J. R. (Autor:in)
MATERIALS SCIENCE AND TECHNOLOGY -LONDON- ; 11 ; 1219-1222
01.01.1995
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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