Annealing effects in undoped and phosphorus doped low temperature oxide layers: Fid-Bau Portal

Annealing effects in undoped and phosphorus doped low temperature oxide layers

Samitier, J. / Moreno, J. A. / Garrido, B. / Marco, S. / Ruiz, O. / Morante, J. R.

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Annealing effects in undoped and phosphorus doped low temperature oxide layers

Samitier, J. / Moreno, J. A. / Garrido, B. / Marco, S. / Ruiz, O. / Morante, J. R.

Annealing effects in undoped and phosphorus doped low temperature oxide layers

Samitier, J. / Moreno, J. A. / Garrido, B. / Marco, S. / Ruiz, O. / Morante, J. R.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Annealing effects in undoped and phosphorus doped low temperature oxide layers

Contributors:

Samitier, J. (author) / Moreno, J. A. (author) / Garrido, B. (author) / Marco, S. (author) / Ruiz, O. (author) / Morante, J. R. (author)

Published in:

MATERIALS SCIENCE AND TECHNOLOGY -LONDON- ; 11 ; 1219-1222

Publication date:

1995-01-01

Size:

4 pages

ISSN:

0267-0836

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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