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Oxygen redistribution during diffusion in thin silicon layers
Oxygen redistribution during diffusion in thin silicon layers
Oxygen redistribution during diffusion in thin silicon layers
Serra, J. M. (Autor:in) / Vallera, A. M. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 36 ; 175-178
01.01.1996
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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