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Oxygen redistribution during diffusion in thin silicon layers
Oxygen redistribution during diffusion in thin silicon layers
Oxygen redistribution during diffusion in thin silicon layers
Serra, J. M. (author) / Vallera, A. M. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 36 ; 175-178
1996-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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