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Detailed analysis of -SiC formation by high dose carbon ion implantation in silicon
Detailed analysis of -SiC formation by high dose carbon ion implantation in silicon
Detailed analysis of -SiC formation by high dose carbon ion implantation in silicon
Romano-Rodriguez, A. (Autor:in) / Serre, C. (Autor:in) / Calvo-Barrio, L. (Autor:in) / Perez-Rodriguez, A. (Autor:in) / Morante, J. R. (Autor:in) / Koegler, R. (Autor:in) / Skorupa, W. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 36 ; 282-285
01.01.1996
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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