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High Dose Implantation in 6H-SiC
High Dose Implantation in 6H-SiC
High Dose Implantation in 6H-SiC
Heera, V. (Autor:in) / Skorupa, W. (Autor:in) / Stoemenos, J. (Autor:in) / Pecz, B. (Autor:in)
MATERIALS SCIENCE FORUM ; 353/356 ; 579-582
01.01.2001
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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