Boron-Doped Nanocrystalline Silicon Thin Films Prepared by PECVD

Wang, X.Q. / Ding, J.N. / Yuan, N.Y. et al. | British Library Online Contents | 2012

Mechanical stress reduction in PECVD a-Si:H thin films

Garrido Alzar, C.L. | British Library Online Contents | 1999

Thermally induced damages of PECVD SiN~x thin films

Liu, Y. / Jehanathan, N. / Dell, J. | British Library Online Contents | 2011

The Study of Microcrystalline Silicon Thin Films Prepared by PECVD

Li, C.Y. / Zhang, H. / Li, J. et al. | British Library Online Contents | 2013

beta-SiC Thin Films Grown by PECVD at Low Temperature

Wei, L. / Mei, W. / Hao, W. | British Library Online Contents | 2001