Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Mechanical stress reduction in PECVD a-Si:H thin films
Mechanical stress reduction in PECVD a-Si:H thin films
Mechanical stress reduction in PECVD a-Si:H thin films
Garrido Alzar, C.L. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 65 ; 123 - 126
01.01.1999
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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