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Thermally induced damages of PECVD SiN~x thin films
Thermally induced damages of PECVD SiN~x thin films
Thermally induced damages of PECVD SiN~x thin films
Liu, Y. (Autor:in) / Jehanathan, N. (Autor:in) / Dell, J. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 26 ; 2552-2557
01.01.2011
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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