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Structural and residual stress changes in Mo/a-Si multilayer thin films with annealing
Structural and residual stress changes in Mo/a-Si multilayer thin films with annealing
Structural and residual stress changes in Mo/a-Si multilayer thin films with annealing
Kassner, M. E. (Autor:in) / Weber, F. J. (Autor:in) / Koike, J. (Autor:in) / Rosen, R. S. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 31 ; 2291-2299
01.01.1996
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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