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Residual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel Substrates
Residual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel Substrates
Residual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel Substrates
Ye, M. (Autor:in) / Berton, G. (Autor:in) / Delplancke, J. L. (Autor:in) / Delplancke, M. P. (Autor:in) / Segers, L. (Autor:in) / Winand, R. (Autor:in) / De Bruyn, K. (Autor:in)
MATERIALS SCIENCE FORUM ; 287/288 ; 275-280
01.01.1998
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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