Fast etching and metallization of via-holes in sapphire with the help of radiation by a copper vapor laser

Dolgaev, S. I. / Lyalin, A. A. / Simakin, A. V. et al. | British Library Online Contents | 1997

Investigation on Preferential Chemical Etching of Dislocations in Sapphire

Xie, X.J. / Li, Y.Y. / Wang, M. et al. | British Library Online Contents | 2011

Laser-induced fast etching and metallization of SiC ceramics

Dolgaev, S. I. / Voronov, V. V. / Shafeev, G. A. et al. | British Library Online Contents | 1997

Low temperature wet etching to reveal sub-surface damage in sapphire substrates

Kumar, Purushottam / Lee, Jinhyung / Lee, Gwangwon et al. | British Library Online Contents | 2013

Low temperature wet etching to reveal sub-surface damage in sapphire substrates

Kumar, P. / Lee, J. / Lee, G. et al. | British Library Online Contents | 2013