Microwave plasma assisted LCVD growth and characterization of GaN

Zhou, B. / Li, X. / Tansley, T. L. et al. | British Library Online Contents | 1996

Hybrid LCVD of micro-metallic lines for TFT-LCD circuit repair

Park, J. B. / Kim, C. J. / Shin, P. E. et al. | British Library Online Contents | 2006

Synthesis of highly conductive cobalt thin films by LCVD at atmospheric pressure

Jeong, Kyunghoon / Lee, Jiwon / Byun, Injae et al. | British Library Online Contents | 2017

Utilisation of Cu(hfac)tmvs precursor gas in LCVD integrated circuit repair system

Leppaevuori, S. / Remes, J. / Moilanen, H. | British Library Online Contents | 1999

Compositional, structural and optical properties of Si-rich a-SiC:H thin films deposited by ArF-LCVD

Lopez, E. / Chiussi, S. / Kosch, U. et al. | British Library Online Contents | 2005