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Microwave plasma assisted LCVD growth and characterization of GaN
Microwave plasma assisted LCVD growth and characterization of GaN
Microwave plasma assisted LCVD growth and characterization of GaN
Zhou, B. (author) / Li, X. (author) / Tansley, T. L. (author) / Butcher, K. S. A. (author)
APPLIED SURFACE SCIENCE ; 99 ; 643-646
1996-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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Microwave plasma assisted LCVD growth and characterization of GaN
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