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Synthesis of highly conductive cobalt thin films by LCVD at atmospheric pressure
Synthesis of highly conductive cobalt thin films by LCVD at atmospheric pressure
Synthesis of highly conductive cobalt thin films by LCVD at atmospheric pressure
Jeong, Kyunghoon (Autor:in) / Lee, Jiwon (Autor:in) / Byun, Injae (Autor:in) / Seong, Myung-jun (Autor:in) / Park, Jongsoo (Autor:in) / Kim, Hyoun Woo (Autor:in) / Kim, Moon J. (Autor:in) / Kim, Jae-Hun (Autor:in) / Lee, Jaegab (Autor:in)
Materials science in semiconductor processing ; 68 ; 245-251
01.01.2017
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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