Deposition mechanism of sputtered amorphous carbon nitride thin film

Durand-Drouhin, O. / Benlahsen, M. / Clin, M. et al. | British Library Online Contents | 2004

Amorphous molybdenum nitride thin films prepared by reactive sputter deposition

Wang, Y. / Lin, R. Y. | British Library Online Contents | 2004

The effect of deposition conditions on structure properties of radio frequency reactive sputtered polycrystalline ZnO films

Gong, H. / Wang, Y. / Yan, Z. et al. | British Library Online Contents | 2002

Effect of post-deposition annealing on composition and electrical properties of dc reactive magnetron sputtered Al2O3 thin films

Prasanna, S. / Shaik, H. / Rao, G.M. et al. | British Library Online Contents | 2014

Effect of the nitrogen-argon gas mixtures on the superconductivity properties of reactively sputtered molybdenum nitride thin films

Haberkorn, N. / Bengio, S. / Suárez, S. et al. | British Library Online Contents | 2018