Effect of deposition conditions on the physical and electrical properties of reactive sputtered molybdenum nitride film: Fid-Bau Portal

Effect of deposition conditions on the physical and electrical properties of reactive sputtered molybdenum nitride film

Lee, J.-Y. / Jeon, S.-R. / Park, J.-W.

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Effect of deposition conditions on the physical and electrical properties of reactive sputtered molybdenum nitride film

Lee, J.-Y. / Jeon, S.-R. / Park, J.-W.

Effect of deposition conditions on the physical and electrical properties of reactive sputtered molybdenum nitride film

Lee, J.-Y. / Jeon, S.-R. / Park, J.-W.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effect of deposition conditions on the physical and electrical properties of reactive sputtered molybdenum nitride film

Contributors:

Lee, J.-Y. (author) / Jeon, S.-R. (author) / Park, J.-W. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 15 ; 1495-1497

Publication date:

1996-01-01

Size:

3 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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