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Effect of post-deposition annealing on composition and electrical properties of dc reactive magnetron sputtered Al2O3 thin films
Effect of post-deposition annealing on composition and electrical properties of dc reactive magnetron sputtered Al2O3 thin films
Effect of post-deposition annealing on composition and electrical properties of dc reactive magnetron sputtered Al2O3 thin films
Prasanna, S. (Autor:in) / Shaik, H. (Autor:in) / Rao, G.M. (Autor:in) / Vandana (Autor:in) / Singh, P.K. (Autor:in) / Jayakumar, S. (Autor:in) / Balasundaraprabhu, R. (Autor:in)
MATERIALS TECHNOLOGY ; 29 ; 83-89
01.01.2014
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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