Self-limiting and step-propagating nature of GaAs atomic layer epitaxy revealed by atomic force microscopy

Yokoyama, H. / Tanimoto, M. / Shinohara, M. et al. | British Library Online Contents | 1994

Growth rate reduction in self-limiting growth of doped GaAs by molecular layer epitaxy

Nishizawa, J. i. / Kurabayashi, T. / Plotka, P. et al. | British Library Online Contents | 2003

Growth of wurtzite GaN on (001) GaAs substrates at low temperature by atomic layer epitaxy

Huang, S.-C. / Wang, H.-Y. / Hsu, C.-J. et al. | British Library Online Contents | 1998

Atomic layer epitaxy (ALE) on porous substrates

Lakomaa, E.-L. | British Library Online Contents | 1994

Effects of active hydrogen on atomic layer epitaxy of GaAs

Meguro, T. / Isshiki, H. / Lee, J.-S. et al. | British Library Online Contents | 1997