Fabrication of SiCN MEMS by UV Lithography of Polysilazane

Wang, H. T. / Xie, Z. P. / Yang, W. Y. et al. | British Library Online Contents | 2007

Fabrication of optical components by laser lithography

Dresel, T. / Schwider, J. | British Library Online Contents | 1996

Mechanical Behavior Simulation of PMMA for Nano Imprint Lithography Using Molecular Dynamics

Kim, J. Y. / Kim, J. H. / Choi, B. I. | British Library Online Contents | 2007

Fabrication of Nano-Sized Gold Dot Array Using Bi-Layer Nano Imprint Lithography

Yang, K. Y. / Hong, S. H. / Lee, H. et al. | British Library Online Contents | 2006

Fabrication of PDMS Nano-Stamp by Replicating Si Nano-Moulds Fabricated by Interference Lithography

Byun, I. / Park, J.H. / Kim, J.W. et al. | British Library Online Contents | 2012