Rutherford backscattering studies of solid phase recrystallization and incorporation in erbium-implanted silicon

Li, D.-Q. / Ren, T.-Q. / Gong, B.-A. et al. | British Library Online Contents | 1995

Recrystallization of Si-, As-, and BF~2-Implanted, Bonded SOI

Tamura, M. / Horiuchi, M. / Materials Research Society | British Library Conference Proceedings | 1998

Recrystallization behavior of high-fluence N+-implanted GaAs studied by Raman spectroscopy

Wang, J. / Mao, H. / Zhu, Z. et al. | British Library Online Contents | 2006

Transient recrystallization of amorphous silicon films

Viatella, J. / Singh, R. K. | British Library Online Contents | 1997

Impurity Concentration Dependence of Recrystallization Process of Phosphorus Implanted 4H-SiC(11-20)

Satoh, M. / Suzuki, T. | British Library Online Contents | 2006