Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Recrystallization of Si-, As-, and BF~2-Implanted, Bonded SOI
Recrystallization of Si-, As-, and BF~2-Implanted, Bonded SOI
Recrystallization of Si-, As-, and BF~2-Implanted, Bonded SOI
Tamura, M. (Autor:in) / Horiuchi, M. (Autor:in) / Ma, E. / Materials Research Society
Symposium, Phase transformations and systems driven far from equilibrium ; 1997 ; Boston; MA
01.01.1998
6 pages
Held as symposium B of the 1997 MRS Fall meeting
Aufsatz (Konferenz)
Englisch
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