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Determination of nitrogen-radical flux by nitridation of Al
Determination of nitrogen-radical flux by nitridation of Al
Determination of nitrogen-radical flux by nitridation of Al
Watanabe, S. (Autor:in) / Nozoye, H. (Autor:in)
APPLIED SURFACE SCIENCE ; 113/114 ; 618-621
01.01.1997
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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